4

Surface micromachined high-performance RF MEMS inductors

Year:
2007
Language:
english
File:
PDF, 234 KB
english, 2007
22

Surface micromachined RF MEMS variable capacitor

Year:
2007
Language:
english
File:
PDF, 895 KB
english, 2007
27

Fabrication and performance of a micromachined 3-D solenoid inductor

Year:
2006
Language:
english
File:
PDF, 253 KB
english, 2006